300mm Flat Top

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Company Name:Semics Inc.
Membership:Free Member
Member Since:2005. 05.15
Country/Region:Korea
City:Gyeonggi-do
Contact:Wonseek Yu
Related Keywords:semiconductor equipment system

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Semics Inc.
[Korea]

Address: C-803, bundang technopark, 145, Yatap-dong, Bundang-gu, Seongnam-si, Gyeonggi-do

Phone: 82-31-7073233

Contact name: Wonseek Yu

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Product Details

Description

Specification

OPUS-II(Spec.)
	ITEM	SPEC
Prober Dimensions	Outer Dimensions	1440mm(W) x 1210mm(D) x 1415mm(H)
Prober Dimensions	Weight	1100kg
Wafer Specifications	Size	6, 8, 12 inch
	Thickness	180㎛ to 2000㎛
	Die Size	350㎛ to 76000㎛
	Weight	Max.350g
Probe Card	Shape	Max.350mm diameter
	Thickness	35 to 40mm
	Weight	Max.20kg
Probing Unit	Position Accuracy	X/Y : ±1.5㎛, Z : ±3㎛
	Contact Accuracy	X/Y : ±3㎛, Z : ±5㎛
	Card Holder Unit Planarity	Max.20㎛/φ300mm
X.Y Stage	X/Y Probing Area	X : ±175mm
	X/Y Probing Area	Y : +280mm, -175mm
	Accuracy	±1㎛
	Control Resolution	0.2㎛
	Maximum Speed	300mm/s
Z Axis	Z Stroke	20mm
	Contact Setting Range	14.5 to 19.5mm
	Drive Method	AC Servo Motor
	Accuracy	±2㎛
	Control Resolution	1㎛
	Maximum Speed	50mm/s
	Over-shoot	MAX.2㎛ (500㎛ at rise)
	Withstand Load	R=90mm Hor. -8㎛ / 20kg Load 980N (100kgf)
	Load Eccentricity	R=145mm , Hor. -28㎛/70kgf
		R=145mm , Ver. -50㎛/70kgf
		Center . Ver. -32㎛/70kgf
Theta Axis	Theta Rotation Mechanism	±6.0°
	Drive Method	Stepping Motor
	Accuracy	±0.5㎛(R=135mm)
	Control Resolution	0.00021°, 0.5㎛ (R=135mm)
Chuck Top	Planarity	10㎛(Std), 20㎛(Hot)
Chuck Top	Temperature	Ambient to 130°C
Alignment	Fine Alignment	Pattern Matching Method
Auto Loader Unit	Cassette Device	1 Loader
Auto Loader Unit	Cassette	SEMI Standards
Tweezers Unit	Tweezers Arm Max. Stroke	570mm
	Tweezers Arm Min. Stroke	500mm/s
	Drive Method	AC Servo Motor
	Accuracy	±10㎛
	Control Resolution	5㎛
Tweezers Rotation Unit	Rotation Time	90°/sec
	Drive Method	Stepping Motor
	Accuracy	±0.0072°
	Control Resolution	0.0072°, (53㎛ on the Chuck Top)
Pre-alignment Unit	Rotation Speed	360°/sec
	Drive Method	Stepping Motor
	Pre-alignment Method	Image Sensor, Fiber Optic Sensor
	Accuracy	X,Y: ±100㎛
	Control Resolution	0.0036° (r150mm 95㎛)
Elevator Unit	Maximum Speed	200mm/s
	Drive Method	AC Servo Motor
	Accuracy	±10㎛
	Control Resolution	5㎛

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